In-Mook Choi, Jong-Ho Kim, Hyo-Jik Lee, Min-Seok Kim, Yeon-Kyu Park, Sam-Yong Woo, Dae-Im Kang
DEVELOPMENT OF ELECTROMAGNETIC PROBE FOR MICRO FORCE MEAUSREMNT
Micro/Nano force measurement is becoming more essential in the fields of AFM metrology, biomedical industries, chemical industries, and material science. For the micro/nano force measurement, a cantilever mounted with Ni/Cr conducting wire has been fabricated by MEMS process. The cantilever with high sensitivity can be driven by Lorentz force which is generated by applying current into the wire under uniform magnetic flux. In order to measure micro/nano force precisely, the cantilever is controlled to a null position with the Lorentz force opposing to a vertical input force. The active measurement method by null balance is more accurate and sensitive than passive measurement method using a piezoresistive cantilever. For this measurement, the simple electromagnetic circuit is analyzed and constructed to obtain high magnetic flux density, and a spring constant for high force sensitivity and a resonant frequency for the stable control of the cantilever are analyzed by FEA. After the construction of a system with a displacement sensor and a controller, the basic measurement characteristics such as a resolution, linearity, and repeatability, will be determined by experiment, and the comparison calibration with a commercial cantilever will be carried out. This electromagnetic active probe can be used as a transfer standard for the micro force evaluation and dissemination. It would also be applicable to various researches and industries, such as binding-force measurement between molecules, force lithography, and nanoindentation.