DESIGN AND FABRICATION OF A THREE-COMPONENT FORCE SENSOR USING MICROMACHINING TECHNOLOGY |
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| Jongho Kim, Yonkyu Park, Daeim Kang |
- Abstract:
- This paper describes a design methodology of a tri-axial silicon-based force sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum force range of 5 N and a minimum force range of 0.1 N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.
- Keywords:
- force sensor, MEMS, beam theory, piezoresistor, finite element analysis
- Download:
- IMEKO-TC3-2002-036.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC3
- Event name:
- Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the age of globalization
- Title:
18th Conference on Force, Mass and Torque (together with 8th HARDMEKO TC5 Conference on Hardness Measurement and 1st TC20 Conference on Civil Engineering Metrology)
- Place:
- Celle, GERMANY
- Time:
- 24 September 2002 - 26 September 2002