UNCERTAINTY EVALUATION OF THE THIN-FILM INDENTATION SYSTEM
Fu-Lung Pan, Yu-Yi Su
Abstract:
Center for Measurement Standards (CMS) had established a thin-film indentation testing system based on Akashi MZT-522. The electronic balance was made use of calibrating the testing force and the internal depth sensor was calibrated by laser hologauge. Five other uncertainty was also evaluated in the paper. Finally, the uncertainty of the thin-film indentation testing system reached a total of 5.02 %.
