HARDNESS MEASUREMENT OF COATING THIN FILM BY INDENTATION PROFILE OBSERVATION USING SCANNING PROBE MICROSCOPY |
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| Shigeo Sato, Masayuki Sato |
- Abstract:
- According to the principle of a conventional Vickers (Berkovich) hardness measurement, hardness is calculated from diagonal lengths or side lengths of indentation. The diagonal length, the conjunction line length of pyramidal indentation, and the distance from the vertex to the base of trigonal pyramidal indentation are measured accurately by observing a vertical cross section. Scanning probe microscopy (SPM) is a good method for observing the vertical and horizontal cross sections of the indentation. However, such parameters in the cross section profile must be defined as the principle of the method to obtain a reliable nano-hardness value.
- Keywords:
- nano-indentation, scanning probe microscopy, nano-haradness
- Download:
- IMEKO-TC5-2007-022.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC5
- Event name:
- Symposium on Recent Advancements in the Theory and Practice of Hardness Measurement
- Title:
- 10th HARDMEKO Conference: HARDMEKO 2007
- Place:
- Tsukuba, JAPAN
- Time:
- 19 November 2007 - 21 November 2007