UNCERTAINTY EVALUATION OF MODULUS AND HARDNESS FOR THE NANOINDENTATION MEASUREMENT SYSTEM
Jiong-Shiun Hsu, Sheng-Jui Chen, Hui-Ching Lu, Shear-Shi Pan, Gwo-Jen Wu, Chung-Lin Wu, Chin-fen Tuan
Abstract:
The uncertainties of nanoindentation measurement system were evaluated in this paper. A precise electonic balance and an optical interferometric system were respectively utilized to calibrate the force and displacement of nanoindentation measurement system. The uncertainties of reduced modulus and indentation hardness providing from the naoindentaion measurement were respectively obtained.
Keywords:
uncertainty, nanoindentation
Download:
IMEKO-TC5-2007-004.pdf
DOI:
-
Event details
IMEKO TC:
TC5
Event name:
Symposium on Recent Advancements in the Theory and Practice of Hardness Measurement
Title:
10th HARDMEKO Conference: HARDMEKO 2007
Place:
Tsukuba, JAPAN
Time:
19 November 2007 - 21 November 2007
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