ISO standards for vacuum metrology

Karl Jousten

Abstract

During the last decade, several important standards and technical specifications (TS) for vacuum metrology have been published by the International Organisation for Standardisation (ISO) or are under development. The pressure ranges for high and ultra-high vacuum have been redefined, and extreme high vacuum has been defined internationally for the first time. Basic standards describing vacuum gauge calibration equipment and methods, as well as the uncertainties associated with a calibration, are supplemented by specific standards for characterising or calibrating specific vacuum gauges. Procedures have also been developed for the characterisation of quadrupole mass spectrometers for partial pressure measurement and for the measurement of outgassing rates in a traceable and comparable manner. A TS for the design of a high-precision ionisation vacuum gauge has recently been published. Reliable vacuum measurement is also important for characterising the performance of vacuum pumps.

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IMEKO-TC16-2023-06.pdf

DOI

10.21014/tc16-2023.06

IMEKO TC

TC16 - Pressure and Vacuum Measurement

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