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THERMO-MECHANICAL MATERIAL CHARACTERIZATION OF PHTOTORESISTS WITH HIGH ASPECT RATIO

J. Vogel, H.-J. Feige, J. Saupe, G. Grützner, J. Grimm
  • Abstract:
    MEMS made of photosensitive polymers offer new functionalities and applications in the micro world. Additionally to the new materials and advanced technologies the analysis of the thermo-mechanical material properties is required to ensure reliability and lifetime. Under this point of view, an uniaxial micro tensile measuring system has been developed to determine stress-strain-curves, Young’s modulus or Poisson’s ratio. The results will be shortly compared with those of Dynamic-Mechanical Analysis (DMA).
  • Keywords:
    photosensitive polymers, material properties, microtensile test by DIC, DMA
  • DOI:
    _unreg_tc15-2014.031

Event details:

[EVENTDETAILS]
  • IMEKO TC:
    TC15
  • Event name:
    TC15 Youth Symposium 2014
  • Title:

    13th Youth Symposium on Experimental Solid Mechanics

  • Place:
    Děčín, CZECH REPUBLIC
  • Time:
    29 June 2014 - 2 July 2014