Possibilities of calibrating the piezo actuator using the laser interferometer in Croatian National Laboratory for Length

• Abstract:

  Only a few of the most advanced national metrology institutes have a Calibration and Measurement Capabilities calibration service in the BIPM Key Comparison Database to calibrate piezoelectric actuators. Given the importance of precise displacement measurements in various high-precision applications, research on the feasibility of calibrating a piezoelectric actuator using a laser interferometer was conducted at the Croatian National Laboratory for Length. In this research a displacement actuator P–621.ZCD, manufactured by Physik Instrumente, has been calibrated using Renishaw ML10 laser interferometer equipped with an EC10 environmental compensation unit. The calibration was performed within a calibration range of up to 1 μm. The paper provides a detailed description of the measurement procedure, the obtained results, and the evaluation of measurement uncertainty.
• Download:

  IMEKO-TC8-11-24-2025-012.pdf
• DOI:

  tc11-2025.012

Event details:

• IMEKO TC:

  TC11
• Event name:

  IMEKO TC8, TC11 and TC24 Conference
• Title:

  Joint conference of the TCs ‘Traceability in Metrology’ (IMEKO TC8), ‘Measurement in Testing, Inspection and Certification’ (IMEKO TC11), and ‘Chemical Measurements’ (IMEKO TC24).

• Place:

  Torino, ITALY
• Time:

  14 September 2025 - 17 September 2025