HIGH PRECISION DIMENSIONAL METROLOGY OF PERIODIC NANOSTRUCTURES USING LASER SCATTEROMETRY

• Abstract:

  At PTB different laser scatterometers with partly novel and outstanding metrological capabilities have been developed and are available for high-resolution dimensional metrology of periodic nanostructures. Two different systems are described and their metrological potential discussed: a laser diffractometer for pitch calibration and a versatile goniometric scatterometer for multi-parameter characterisation of nanostructures.
• Download:

  IMEKO-TC14-2011-29.pdf
• DOI:

  _unreg_tc14-2011.29

Event details:

• IMEKO TC:

  TC14
• Event name:

  TC14 LMPMI Symposium 2011
• Title:

  10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

• Place:

  Braunschweig, GERMANY
• Time:

  12 September 2011 - 14 September 2011