Possibilities of calibrating the piezo actuator using the laser interferometer in Croatian National Laboratory for Length

Vedran Šimunović, Vilim Kožuh, Gorana Baršić

Abstract

Only a few of the most advanced national metrology institutes have a Calibration and Measurement Capabilities calibration service in the BIPM Key Comparison Database to calibrate piezoelectric actuators. Given the importance of precise displacement measurements in various high-precision applications, research on the feasibility of calibrating a piezoelectric actuator using a laser interferometer was conducted at the Croatian National Laboratory for Length. In this research a displacement actuator P–621.ZCD, manufactured by Physik Instrumente, has been calibrated using Renishaw ML10 laser interferometer equipped with an EC10 environmental compensation unit. The calibration was performed within a calibration range of up to 1 μm. The paper provides a detailed description of the measurement procedure, the obtained results, and the evaluation of measurement uncertainty.

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IMEKO-TC8-11-24-2025-012.pdf

DOI

10.21014/tc11-2025.012

IMEKO TC

TC11 - Measurement in Testing, Inspection and Certification

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