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PROJECTION MOIRÉ PROFILOMETRY USING LIQUID CRYSTAL DIGITAL GRATINGS

Fumio Kobayashi, Yukitoshi Otani, Toru Yoshizawa
  • Abstract:
    A projection moiré profilometry using a pair of liquid crystal digital gratings (LCDG) is applied to determine a step height using two liquid crystal digital gratings (LCDGs). Moiré contours are filtered over to remove the images of the original grating from the moiré counter when a pairs of grating images are traveled to the same direction in-phase electrically. The new idea of this report is proposed to overcome the 2 π ambiguity of moiré contour by changing the fringe interval of Moiré contours which are adjusted the period of LCDGs. The measured accuracy has been achieved to ±0.7 mm in the range of 96 mm of steep height by projecting two different of grating periods as 6.7 and 13.3 time of original grating.
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  • DOI:
    _unreg_tc14-2011.25

Event details:

[EVENTDETAILS]
  • IMEKO TC:
    TC14
  • Event name:
    TC14 LMPMI Symposium 2011
  • Title:

    10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

  • Place:
    Braunschweig, GERMANY
  • Time:
    12 September 2011 - 14 September 2011