LASER INTERFERENCE THERMOMETRY OF SOLIDS IN PLASMAS

• Abstract:

  Laser interferometric thermometry of semiconductor and dielectric plates is the most sensitive and reliable technique for measurements in plasma processing. This technique can be used within a wide range of experimental conditions, including roughness and thin films on the surface, non-parallelism of surfaces, almost any angle of light incidence. Some results on the temperature monitoring of silicon crystal heated in a plasma and on the end-point detection of exothermic plasma chemical reaction on the surface are presented.
• Keywords:

  laser thermometry, plasma surface interaction
• Download:

  IMEKO-WC-2000-TC12-P310.pdf
• DOI:

  _unreg_wc-2000.310

Event details:

• IMEKO TC:
• Event name:

  XVI IMEKO World Congress
• Title:

  Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

• Place:

  Vienna, AUSTRIA
• Time:

  25 September 2000 - 28 September 2000