DEVELOPMENT OF A LOW–COST MEASUREMENT SYSTEM FOR CUTTING EDGE PROFILE DETECTION

• Abstract:

  This paper describes the use of a CD pickup head as a displacement measurement system. First, the components contained in a pickup head are explained and how they are combined to obtain the functionality of a pickup head. Afterwards, the application of measuring a knife edge profile is introduced.The results revealed some insuffiencies with the current system. Nevertheless, the cutting edge’s radius of curvature can be estimated.
• Keywords:

  optical pickup head, CD, profile measurement.
• Download:

  IMEKO-TC2-2010-06.pdf
• DOI:

  _unreg_tc2-2015.06

Event details:

• IMEKO TC:

  TC2
• Event name:

  TC2 Symposium 2010
• Title:

  19th Symposium on Photonic Measurements
• Place:

  Hangzhou, CHINA
• Time:

  11 September 2010 - 13 September 2010