DEFLECTOMETRIC PROFILER WITH SMALL BEAM SIZE USING A COMMERCIALLY AVAILABLE AUTOCOLLIMATOR

• Abstract:

  The special resolution of the angle-based deflectometric surface profiler has been improved by introducing a novel null instrument. Proposed null instrument is simple, inexpensive, and has fast response time. High accuracy flatness measurement for low reflective surface has been successfully demonstrated with 1 mm laser beam spot size. The repeatability of the surface form measurement is better than ±0.6 nm.
• Keywords:

  flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator
• Download:

  IMEKO-TC14-2014-03.pdf
• DOI:

  _unreg_tc14-2014.03

Event details:

• IMEKO TC:

  TC14
• Event name:

  TC14 LMPMI Symposium 2014
• Title:

  11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

• Place:

  Tsukuba, JAPAN
• Time:

  3 September 2014 - 5 September 2014