ACCURATE DETERMINATION OF SPRING CONSTANT OF ATOMIC FORCE MICROSCOPE CANTILEVER AND COMPARISON WITH OTHER METHODS

• Abstract:

  We present an AFM cantilever calibration system: Nano Force Calibrator (NFC), which can provide accurate spring constant calibrations with traceability to SI. Two types of commercial beam-shaped AFM cantilevers (contact and tapping mode) are investigated using the NFC. Uncertainty analysis reveals that the uncertainty of present method is less than 1%. In addition, comparison between other famous calibration methods (dimensional, cantileveron- cantilever, and Sader method) and the NFC method is performed to assess the uncertainties of other three methods. From the comparison results, we estimate that the uncertainties of dimensional, cantilever-on-cantilever, and Sader method are around 10-15%, 10%, and 15-40%, respectively.
• Keywords:

  atomic force microscopy, calibration, cantilever, spring constant
• Download:

  PWC-2006-TC3-019u.pdf
• DOI:

  _unreg_wc-2006.TC3-019

Event details:

• IMEKO TC:
• Event name:

  XVIII IMEKO World Congress
• Title:

  Metrology for a Sustainable Development

• Place:

  Rio de Janeiro, BRAZIL
• Time:

  17 September 2006 - 22 September 2006